EVG120 Automated Resist Processing System for Micro- and Nano-Electronics

EV Group offers a new automated resist processing system, EVG120, which is specifically designed to process substrates of different shapes and sizes of up to 200 mm. The system offers a number of benefits and ensures high quality standards in a variety of applications at reduced cost of ownership. The EVG 120 has high throughput capability and suitable for high volume production. Moreover, it comes in a compact design for minimal footprint.

Key Features

The main features of the EVG120 resist processing system are:

  • Flexible resist processing tool for different process variations
  • Flexible combinations of multifunctional modules for developing, spin and spray coating, bake and chill make it suitable for various application fields
  • Proprietary Omni Spray ultrasonic atomization technology delivers excellent process results during conformal coating of extreme topographies
  • CoverSpinTM technology for optimum spin coating results
  • Advanced and field-proven robot handling with dual end-effector capability guarantees continuous high throughput
  • Megasonic technology for cleaning, developing and sono-chemical processing enhances process efficiency and reduces process time
  • EVG Framework based smart process scheduling capability
  • Compact design for minimal footprint
  • Excellent process development support and service
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