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Posted in | Nanoimprint Lithography Equipment

半自动热压系统 - 电动车组EVG520HE

半自动热压系统 - 电动车组EVG520HE
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EVG520HE半自动热压系统是专为压花和奈米应用。这EVG生产行之有效的制度，接受基板高达200毫米和兼容标准的半导体制造技术。

热压系统配置了一个普遍的压花室，高真空，高温和高接触力能力和管理的一整套适合热压聚合物和几杯。加上高宽比压花和多个DE压印选项提供许多高品质的图形转移和纳米分辨率过程。

EVG520HE半自动热压系统的功能包括：

  • 对于热压印和奈米应用的聚合物衬底和自旋聚合物和眼镜
  • 自动压印
  • EVG的专有光学对准压印和印迹单独的校准过程
  • 气动压印的选择
  • 软件控制流程执行
  • UV - NIL选项

Last Update: 5. October 2011 23:27

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