Sputtering Systems

Sputtering is a method of depositing thin materials on a variety of substrates. Using radio frequency (RF) power to drive the deposition, both metals and dielectric materials can be grown.

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Equipment

SC 1500 Inline Sputtering System from Semicore

The SC 1500 inline sputtering system offers an economic, modular and scalable design to meet the requirements of high-volume or pilot production.

DCA Instruments L400 UHV Sputtering System

The L400 UHV magnetron sputtering system is designed for sequential sputtering with movable magnetrons. Conventional sequential sputtering systems with rotating planetary substrate stage provide limited substrate manipulation facilities. In the L400 design the substrate stage is stationary and the magnetrons are moved in sequence of the deposited multilayer. This allows the use of substrate masking with movable shutters, RF and DC substrate bias, wedge deposition and azimuthal substrate rotation - features not available in any other sputtering system.

The Triaxis Sputtering System from Semicore

The Triaxis sputtering system is manufactured by engineering talents at Semicore, a Silicon Valley-based manufacturer.

TriAxis Thin Film Deposition System from Semicore

Semicore’s TriAxis systems utilize a cost-effective “open platform” design that is easily configured to suit a variety of thin film deposition applications, typically for R&D or small batch production. The TriAxis offers unequaled versatility by being the first to offer all three axes of sputter deposition arrangements (up, down or horizontal) in a single platform. A comprehensive list of standard options is available to configure the TriAxis to suit your specific requirements.

Turbo-Pumped Sputter Coater/Carbon Coater - The Q150T from Quorum Technologies

The Q150T is a compact turbomolecular-pumped coating system suitable for SEM, TEM and many thin film applications. It is suited to producing metal or carbon coatings.

TriAxis Electron Beam, Resistive Evaporation System from Semicore

The TriAxis electron beam evaporation system includes a 304 stainless steel cylindrical chamber with a typical size range 18 or 24 inch diameter and is scaled to match the specific application.

SC 250/450 Sputtering System from Semicore

Semicore, creators and manufacturers of precision thin film vacuum deposition systems and products have in their portfolio the SC250 & SC450 sputtering system which offer high quality, advanced features and is also cost-effective.

SC3500 Evaporation System from Semicore

The SC3500 evaporation system from Semicore is made of stainless steel and is a water cooled process chamber with swing open front access door

AJA International ATC Series Sputtering Systems

The AJA International, Inc. ATC Series Thin Film Deposition Systems are versatile coating tools that can be built in a wide variety of configurations to satisfy almost any requirement. These systems are built around AJA's unique A300-XP (UHV) or Stiletto Series (HV) magnetron sputtering sources which feature in-situ source head tilting allowing precise and repeatable con-focal, direct, and off-axis deposition.