LayTec Presents Results of On-Line Deposition Rate Measurements in Sputter Processes at ICTF 14

At the 14th International Conference on Thin Films (ICTF 14) in Belgium last week LayTec has presented the latest results of on-line deposition rate measurements in sputter processes. Dr. Steffen Uredat of LayTec reported on the application for magnetic storage systems and MRAM at SINGULUS Nano Deposition Technologies GmbH in Kahl, Germany. Dr. Berthold Ocker and his team at SINGULUS use a LayTec sensor to monitor the deposition rate of thick Al2O3 layers on Si for end-point detection in a newly developed sputter chamber with 10 x 8" substrates. Like all other LayTec products, the sensor also determines optical properties (R, n, k) and indicates surface roughness.

On-line deposition rate (red curve) and layer thickness (blue curve) measurements during deposition of Al2O3 for end-point detection of 30 ìm target thickness.

Dr. Uredat also presented results gained by monitoring of thin SiO2-SiNx-layer stacks for antireflection coatings deposited on glass by reactive sputtering at Fraunhofer Institute of Electron Beam and Plasma Technology (FEP) in Dresden, Germany. Unlike the commonly used quartz crystal monitors, LayTec's in-situ sensors measure directly on the thin-film surface and provide information about deposition rate and surface morphology on-line. In contrast to transmittance measurements, they are applicable for opaque substrates as well and need only one view-port.

For further information or a copy of Dr. Uredat's presentation please contact [email protected].

Citations

Please use one of the following formats to cite this article in your essay, paper or report:

  • APA

    LayTec GmbH. (2019, February 15). LayTec Presents Results of On-Line Deposition Rate Measurements in Sputter Processes at ICTF 14. AZoNano. Retrieved on June 17, 2024 from https://www.azonano.com/news.aspx?newsID=8928.

  • MLA

    LayTec GmbH. "LayTec Presents Results of On-Line Deposition Rate Measurements in Sputter Processes at ICTF 14". AZoNano. 17 June 2024. <https://www.azonano.com/news.aspx?newsID=8928>.

  • Chicago

    LayTec GmbH. "LayTec Presents Results of On-Line Deposition Rate Measurements in Sputter Processes at ICTF 14". AZoNano. https://www.azonano.com/news.aspx?newsID=8928. (accessed June 17, 2024).

  • Harvard

    LayTec GmbH. 2019. LayTec Presents Results of On-Line Deposition Rate Measurements in Sputter Processes at ICTF 14. AZoNano, viewed 17 June 2024, https://www.azonano.com/news.aspx?newsID=8928.

Tell Us What You Think

Do you have a review, update or anything you would like to add to this news story?

Leave your feedback
Your comment type
Submit

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.