The P-17 stylus profiler surface measurement system from KLA Instruments provides excellent measurement repeatability for consistent measurement of 2D and 3D topography. It has 200mm scan length standard that can provide long scan capability without the need for stitching. The P-17 OF (Open Frame) configuration provides a larger frame for samples up to 300mm.
The P-17 measurement head includes the UltraLite® sensor, which delivers dynamic force control, exceptional linearity, and high vertical resolution, making it an ideal sensor for characterization of step height, surface roughness and waviness, bow, thin film stress, and defect review.
The P-17 stylus profiler is designed for ease-of-use, with fast recipe setup, top and side view optics and a 5MP high resolution color camera. Advanced data analysis and automated production features are equally suited to R&D, university, and production environments.
Key Features
The main features of the P-17 stylus profiler include:
- Vertical range from nm up to 1mm
- Constant force control from 0.03 to 50mg
- Full diameter scanning without stitching for bow and film stress measurement
- Superior measurement repeatability and reproducibility
- Easy-to-use software, including fully-automated measurement with sequencing, pattern recognition, and SECS/GEM
- Fully-motorized XY stage, Z stage, and 360° theta stage
Applications
The main applications of the P-17 stylus profiler include:
- Thin and thick film step height measurements
- Surface roughness and waviness characterization
- Photoresist / soft films
- Etched trench depth
- Defect review and defect analysis
- Surface curvature and form
- 2D stress of thin films
- 3D imaging of various surfaces
- Dimensional analysis and surface texture
Broad Range of Industries
The P-17 capabilities support research, production, and quality control (QC) across a wide range of industries, including:
- Universities, research labs, and institutes
- Medical devices
- Semiconductor and compound semiconductor
- SIMS craters
- LED (light-emitting diodes) and power devices
- Solar
- Automotive
- MEMS (micro-electro-mechanical systems)
- Data storage