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Plasma technology is used in the fabrication of most semiconductor devices created today across a wide range of industries. It is able to provide unique solutions for the creation and manipulation of matter with atomic scale accuracy.
High-performance, reliable and flexible systems across several etching & deposition technologies. Systems range from single load-lock R&D systems to full clusterable production systems for high volume manufacturing.
Oxford Instruments Plasma Technology Releases PTIQ: Intelligent Control Software
Oxford Instruments Launches Ionfab® Solution Providing Large Area, High Yield Manufacturing for Augmented Reality Applications
Oxford Instruments Supplies ITRI with Plasma Etch Solutions for MicroLED Development
ULVAC Inc., and Oxford Instruments Plasma Technology collaborate to bring Atomic Scale Processing solutions to the Japanese Power and RF markets
Oxford Instruments Plasma Technology announces a new partner in Korea
Introducing the FlexAL-2D the ALD Plasma Processing System for 2D Materials
Pushing the Bounds of Nanoscale Processing at ‘Nanotech 2017: Pushing the Limits’ Workshop
Young Nanoscientist India Award 2017 Winner Announced
Leading High Tech Manufacturer Oxford Instruments Plasma Technology Appoints New MD
Prestigious Nanjing University Orders Multiple Oxford Instruments Plasma Systems
New Etching Process for Magnetic RAM Developed by Cornell NanoScale Facility and Oxford Instruments Plasma Technolog P
Oxford Instruments Announce more Speakers for their 2D Materials Processing Technology Workshop
Oxford Instruments is ‘Bringing the Nanoworld Together’ in India for the Fourth Time
Oxford Instruments to Hold Free Webinar on NEMS and Nanotechnology
Webinar: Enabling Wide Band Gap Power Semiconductor Devices to Deliver Energy Efficiency Savings
NanoLED SEM Image from TU/E Wins Oxford Instruments SEM Competition
Oxford Instruments CVD Equipment Used for Graphene and 2D Materials Research in Institutes Across Europe and US
Prof. Arindam Ghosh awarded “Young Nanoscientist India Award 2015”
The University of Manchester Uses Oxford Instruments Tools for Ground Breaking Graphene Research
Oxford Instruments Report Successful Nanotechnology Seminars in Delhi, Kolkata
Nanofabrication Research Capabilities Expanded at Top Southern USA University
Oxford Instruments Plasma Technology and IOP to Hold Webinar on Fabrication Technologies for 2D Materials
Oxford Instruments Announce Next in Series of Nanotechnology Seminars in India
CiS Research Institute Place Order for Oxford Instruments Plasma Etch System for MEMS R&D
Speakers Announced for Oxford Instruments Seminar at IOP in Beijing
The Future of MEMS and NEMS, a Technical Seminar held at IEMN, Lille
New Nano Webinar Announced by Oxford Instruments Plasma Technology
Glasgow's James Watt Nanofabrication Centre Builds Multi-Million Pound Deposition and Analysis Cluster with Oxford Instruments
USTC Nanotechnology Center Installing Multiple Plasma Systems
Oxford Instruments Plan Series of Indian Seminars on "Bringing the Nanoworld Together"
Nanoscale Plasma Processing Seminars - co-hosted by Oxford Instruments and Cornell University
Oxford Instruments Continues Chinese Seminar Series on Nanoscale Plasma Processing
Oxford Instruments Workshop on Nanoscale Plasma Processing At MIT Microsystems Lab Was A Great Success
Seminar In Bangalore Largest Organised By Oxford Instruments To Date
Oxford Instruments FlexAL ALD System Chosen By Chalmers University
Oxford Instruments to Run Workshop at IISc Bangalore on Nanoscale Fabrication and Analysis
Oxford Instruments Plasma Technology Release New iPad App
Annual Seminar to Address Latest Developments in Plasma Etch Deposition and Growth
German Researchers to Use Oxford Instruments Plasma Etch Tool for HBLED Development
Hurry - Make Sure You Book in for Etch Tech 2012
Oxford Instruments Launch PlasmaPro Estrelas100 Silicon Etch Tool
Open Access NanoLab Add RIE and PECVD Tools from Oxford Instruments
Oxford Instruments to Hold Seminar on Nanoscale Plasma Processing in Shanghai
Oxford Instruments Plasma Technology's Headquarters Receives ISO14001 Accreditation
Oxford Instruments Present Inaugural Award for Best MSc Project in Nanotechnology
Oxford Instruments Plasma Technology Win Queen's Award for Enterprise
Oxford Instruments to Host Nanoscale Plasma Processing Workshop
Oxford Instruments Plasma Technology Adds Expertise to Executive Team
James Watt Nanofabrication Centre Adds an Oxford Instruments ICP Plasma Etch System to Its Arsenal
New Deep Silicon Etch Technology for MEMS Applications
New GM for Oxford Instruments Plasma Technology
Oxford Instruments Wins Award for Export earning Performance
Oxford Instruments Plasma Technology Clients Benefit from Expansion Project
Oxford Instruments Plasma Technology Announce Dates for 2011 Seminars
ISMI, Oxford Instruments Join for Coating 450 mm Silicon Wafers with PECVD SiO2 Films
Oxford Instruments Plasma Technology Launches Next Generation HBLED Batch Production Tools
Oxford Instruments Plasma Technology Ships Ionfab500 to Key Customer in Asia.
Oxford Instruments Plasma Technology Receives Order From Nanotechnology Institute
New White Paper on Ion Beam Deposition Processes and Technologies Now Available for Download
Oxford Instruments Plasma Technology Receives Multi-System Order from University of Waterloo
Oxford Instruments NanoScience Awarded The Queen's Award for Enterprise: Innovation
Oxford Instruments Plasma Technology Wins Contract for Five Module Cluster Tool from Robert Bosch
Oxford Instruments Announces 2010 Winner of Lee Osheroff Richardson North American Science Prize
Oxford Instruments Appoints New General Manager
Oxford Instruments Plasma Technology Release LN2 Upgrade for Cryo Tables
Oxford Instruments Receives Order for State-of-the Art High Field Magnet from Diamond Light Source
Oxford Instruments Plasma Technology to Host Several Seminars and Workshops
Oxford Instruments' TDI Awarded $600,000 To Boost Production of Solid-State Lighting Materials
Oxford Instruments Announces Improved End-Pointing Capability on Plasma Etch and Deposition Tools
Oxford Instruments Announces Sales of Systems for Production of HB LEDs Continue to Grow
Oxford Instruments Delivers its 50th CryofreeR Rilution Refrigerator on its 50th Anniversary
Oxford Instruments Plasma Technology Receives Order from IMB Barcelona
STnano Purchases Plasmalab System80 Plus ICP System from Oxford Instruments Plasma Technology
Oxford Instruments Plasma Technology Announces the Launch of Nanofab 800 Agile System
Oxford Instruments Plasma Technology Receives Order from Bridgelux
Oxford Instruments Plasma Technology Receives Second Order from Liverpool University
Oxford Instruments Plasma Technology Announces Several Seminars for 2009
Oxford Instruments Plasma Technology Wins Order From a Leading HB-LEDs Manufacturer