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Nanofabrication Research Capabilities Expanded at Top Southern USA University

Vanderbilt University in Tennessee, USA is expanding its research capabilities with the addition of an Oxford Instruments PlasmaPro® 100 Cobra plasma etch system, shortly to be installed in the University’s Vanderbilt Institute of Nanoscale Science and Engineering (VINSE) clean-room laboratory.

The highly configurable PlasmaPro 100 Cobra system offers ICP dry etching supported by an extensive range of processes, making it eminently suitable for nanofabrication research.

Says Professor Anthony Hmelo, Associate Director for Operations at VINSE, “Until now we have needed to access other regional shared laboratories to undertake the type of processing that will now be facilitated at VINSE using the PlasmaPro 100. We’re consequently very excited about this purchase, and look forward to working together with Oxford Instruments to take advantage of this highly versatile tool.”

Dr David Haynes, Sales and Marketing Director at Oxford Instruments Plasma Technology comments, “Our broad range of plasma etch systems offers compact ICP and RIE tools through to multi wafer and cluster tools. As well as providing systems for production, our systems are used globally for fundamental research and development, utilising many new and advanced techniques.  Having one of our PlasmaPro 100 Cobra systems installed at VINSE to further their research is great news for us.”

About Oxford Instruments plc

Oxford Instruments designs, supplies and supports high-technology tools and systems with a focus on research and industrial applications. Innovation has been the driving force behind Oxford Instruments' growth and success for over 50 years, and its strategy is to effect the successful commercialisation of these ideas by bringing them to market in a timely and customer-focused fashion.

The first technology business to be spun out from Oxford University, Oxford Instruments is now a global company with over 2300 staff worldwide and is listed on the FTSE250 index of the London Stock Exchange (OXIG).  Its objective is to be the leading provider of new generation tools and systems for the research and industrial sectors with a focus on nanotechnology. Its key market sectors include nano-fabrication and nano-materials. The company’s strategy is to expand the business into the life sciences arena, where nanotechnology and biotechnology intersect

This involves the combination of core technologies in areas such as low temperature, high magnetic field and ultra high vacuum environments; Nuclear Magnetic Resonance; x-ray, electron, laser and optical based metrology; atomic force microscopy; optical imaging; advanced growth, deposition and etching.

Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology. Its products, expertise, and ideas address global issues such as energy, environment, security and health.

About Oxford Instruments Plasma Technology

Oxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable engineering of micro- and nano-structures. Our systems provide process solutions for the etching of nanometre sized features, nanolayer deposition and the controlled growth of nanostructures.

These solutions are based on core technologies in plasma-enhanced deposition and etch, ion-beam deposition and etch, atomic layer deposition, deep silicon etch and physical vapour deposition. Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.


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