The Evactron® E16 De-Contaminator is a compact, streamlined plasma cleaner designed for electron and ion beam instrument load locks, including SEMs, TEMs, FIBs, and sample preparation chambers.
The E16 gently yet efficiently cleans instruments, effectively improving resolution and imaging, as well as detector and probe sensitivity that can be affected by contamination.
New design elements in the Evactron® E16 Plasma Radical Source (PRS) include a flush-mount flange and a compact form factor to fit into limited spaces on a chamber wall. The Evactron® E16 Power Centre controller has a reduced footprint and can be positioned horizontally or vertically to save lab space.
Specifications
- Programmable ignition power, cleaning power, cycle time, and number of cycles
- Power Centre controller – W × H × D: 12.25” × 3.5” × 9.34” (31 × 8.9 × 23.7 cm)
- Compact PRS – W × H × D: 2.5” × 2.125” × 3.75” (6.3 × 5.4 × 9.5 cm)
- Energy efficient radio frequency hollow cathode plasma (RFHC)
- No match or gas flow adjustments needed for plasma ignition
- PRS can be flush-mounted on the chamber or the load lock
- Broad operating pressure range: 1 Torr to 1.0 E-3 Torr
- Touchpad-based programming for cleaning recipes
- Fixed input air flow rate, no adjustments needed
- TÜV, NRTL, and CE safety certified
- RF Power: 5-16 W continuous
- Compatible with turbo pumps