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The Future of MEMS and NEMS, a Technical Seminar held at IEMN, Lille

An interactive, one day technical seminar focused on practical applications, techniques and advances in ‘Nanoscale Processing for NEMS and MEMS’ at Oxford Instruments’ technical workshop, hosted in conjunction with the Institute of Electronics Micro-electronics and Nanotechnology (IEMN) in Lille, France.

Attracting participants from key establishments in Germany, Netherlands and France, this one day event included talks from guest speakers and Oxford Instruments process specialists, keeping participants abreast of the latest technologies and trends in these hot industry research topics including:

  • 'Looking towards the next generation of MEMS devices' Dr.Eric Mounier Senior Analyst, MEMS Devices & Technologies, Yole Développement
  • 'Transformational electronics – a powerful futuristic paradigm on and for Oxford Instruments' Galo Torres Sevilla, Integrated Nanotechnology Lab, King Abdullah University of Science and Technology, Saudi Arabia
  • 'Etch and Deposition Plasma Processes for MEMS and TSV', 'ALD for MEMS', 'Nanoscale Etch'
  • 'MEMS & NEMS Micro-technological processes for sensors, energy harvesting and energy management' Professor Laurent Montes, Associate Prof, Grenoble INP
  • 'A microwave induced remote afterglow reactor for the deposition of Organosilicon plasma polymers' Garrett Curley, IEMN
  • 'MEMS research applications and results' Steve Arscot, IEMN

Many positive comments resulted from the event:

"It was a very interesting state of the art event about plasma processes, and the aims for the future have been well presented"

"Globally, the content was of high quality."

"Even if I am not a specialist of plasma technologies, almost everything was understandable. Presentations were very accessible for people interested in the technologies presented."

"Other suppliers do not care too much about what happens after sales, I appreciate the effort made by Oxford Instruments and that is the kind of thing people remember when making the next purchase."

Francois Neuilly, Micro and Nano Fabrication Fab Manager at IEMN commented, "This event attracted a high calibre audience to IEMN and we were very pleased to host at our facility. It offered a good opportunity for the wider European plasma processing community to meet and share their experiences and vision for the future of this exciting area. It was great to learn from leading international experts in their field, both through the presentations and the networking opportunity the event created."

About Oxford Instruments plc

Oxford Instruments designs, supplies and supports high-technology tools and systems with a focus on research and industrial applications. Innovation has been the driving force behind Oxford Instruments' growth and success for over 50 years, and its strategy is to effect the successful commercialisation of these ideas by bringing them to market in a timely and customer-focused fashion.

The first technology business to be spun out from Oxford University, Oxford Instruments is now a global company with over 2300 staff worldwide and is listed on the FTSE250 index of the London Stock Exchange (OXIG).  Its objective is to be the leading provider of new generation tools and systems for the research and industrial sectors with a focus on nanotechnology. Its key market sectors include nano-fabrication and nano-materials. The company’s strategy is to expand the business into the life sciences arena, where nanotechnology and biotechnology intersect.

This involves the combination of core technologies in areas such as low temperature, high magnetic field and ultra high vacuum environments; Nuclear Magnetic Resonance; x-ray, electron, laser and optical based metrology; atomic force microscopy; optical imaging; advanced growth, deposition and etching.

Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology. Its products, expertise, and ideas address global issues such as energy, environment, security and health.


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