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New Deep Silicon Etch Technology for MEMS Applications

Oxford Instruments announces the launch of PlasmaPro Estrelas100, new deep silicon etch technology developed to deliver industry leading process performance, and providing flexible solutions to the MEMS market.

With the R&D market in mind, PlasmaPro Estrelas100 offers the ultimate in process flexibility. Nano and micro structures can be realised as the hardware has been designed with the ability to run Bosch and cryo etch technologies in the same chamber. From smooth sidewall processes to high etch rate processes, the PlasmaPro Estrelas100 has been developed ensuring that the variety of MEMS applications can be achieved without the need to change the chamber hardware.

As the development and commercialisation of new Micro Electro Mechanical Systems (MEMS) is becoming a reality, traditional devices such as accelerometers, gyroscopes and microphones continue to see increased adoption in many consumer electronics, displays and automotive applications. MEMS can provide a solution where there is a requirement for a device or sensor to be miniaturised. Devices emerging in the R&D phase include energy harvesting; speakers; RFID; pico projectors; oscillators; micro fuel cells; and autofocus technologies amongst others.

"Oxford Instruments Plasma Technology continues to provide technologies that address existing and emerging applications in the MEMS market," comments Mark Vosloo, Oxford Instruments Plasma Technology Sales Director, "With a broad process and application portfolio, our technologies enable many of the applications identified today and those of tomorrow. With over 19 years experience in MEMS R&D we understand the market, and address the needs of our customers to provide them with the most innovative tools available."

Low Cost of Ownership through optimised hardware and processes control, coupled with outstanding global customer support, mean that Oxford Instruments continues to offer their customers an excellent product offering.

This latest system development reinforces Oxford Instruments' aim to be the leading provider of new generation tools and systems for industrial and research markets, based on our ability to analyse and manipulate matter at the smallest scale. The company uses innovation to turn smart science into worldclass products that support research and industry to address the great challenges of the 21st Century.


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