Key Features and Capabilities of the Agilent Technologies Scanning Microwave Microscopy System
Agilent
Technologies' unique scanning microwave microscopy (SMM) mode combines
the comprehensive electrical measurement capabilities of a performance network
analyzer (PNA) with the outstanding spatial resolution of an atomic force microscope
(AFM). SMM Mode outperforms traditional AFM-based scanning capacitance microscopy
techniques, offering far greater application versatility, the ability to acquire
quantitative results, and the highest sensitivity and dynamic range in the industry.
In SMM Mode, the performance
network analyzer sends an incident
radio frequency (RF) signal through a
diplexer to the sub-7 nm conductive tip
of a platinum-iridium cantilever. The
RF signal is refl ected from the tip and
measured by the PNA. The magnitude
and phase of the ratio between the
incident and reflected signals are
calculated and a model is then applied
in order to calculate the electrical
properties of the sample. The AFM
scans the sample and moves the tip
to specific locations to perform point
probing. Operation frequencies up to
6 GHz are supported.
Run time 2.24 mins