Nano-Circuitry Measured By Old X-Ray Technique - New Technology

National Institute of Standards and Technology (NIST) is using an old X-Ray technique to measure nanometer-scale devices on computer chips.

They are having success in using small-angle x-ray scattering (SAXS) to measure the size and shape of grid like patterns with 180 nanometer line widths. Precision is better than 1 nanometer and images derived from the technique give high-precision measurements of line widths, spaces and features including roughness of walls and the edges of lines.

Posted 1st February 2004

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