Regulus8230: A High Resolution Scanning Electron Microscope

Hitachi’s Regulus8230 is an ultra-high resolution cold-field emission SEM that has been enhanced for sensitive materials and nanostructures.

Image the Most Challenging Specimens

  • Sophisticated multi-detection system inclusive of energy filtering
  • Sub-nanometer resolution available even below 1 kV
  • Comprehend internal sample data with angular adjustable HAADF, ADF and BF
  • High contrast imaging available at an ultra-low dose with the immersion lens detection system

Regulus8230: A High Resolution Scanning Electron Microscope

Image Credit: Hitachi High-Tech Europe

Advanced Nanoanalysis

  • Enhanced for windowless or annular EDS detectors, thereby providing excellent light element analysis
  • Superfast, high sensitivity EDS can be realized with annular detectors that have a solid angle of >1 sr

Quick Sample Handling

  • Quick sample exchange via load lock for samples of up to 200 mm diameter
  • Users can easily navigate on their sample or holder to determine the right area of interest using acquired SEM images or color optical image

Regulus8230: A High Resolution Scanning Electron Microscope

Image Credit: Hitachi High-Tech Europe

Powerful Automation Tools

  • Users can automatically image huge sample areas over multiple fields of view
  • Volume microscopy can be done using automated array tomography
  • Users can automate repetitive or complex procedures with the help of advanced scripting
  • Precise, calibrated, dimension measurements can be performed with CD-SEM algorithms

Future Proof

  • Users can load encapsulated oxidation-sensitive specimens (such as Lithium battery components) under inert-gas environments or vacuum
  • Hydrated or sensitive samples can be images using Hitachi’s patented Ionic Liquid or a cryo stage
  • Users can add CL for acquiring more data from pharmaceuticals, photonics, or minerals

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