Park NX20 Lite AFM System

The Park NX20 Lite has several unique features that make it perfect for shared laboratories that manage a wide range of samples, failure analysis engineers working on wafers and researchers doing multi-variant experiments.

It is also one of the best-value large-sample AFMs currently available on the market due to its affordable pricing and robust feature set.

The Most Convenient Sample Measurements with MultiSample Scan

  • Specially designed multi-sample chuck for the loading of up to 16 individual samples (optionally available)
  • A fully motorized XY sample stage travels up to 150 mm x 150 mm
  • Automated imaging of multiple samples in one pass

Accurate XY Scan by Crosstalk Elimination

  • Two independent and closed-loop XY and Z flexure scanners
  • Flat and orthogonal XY scan available with low residual bow
  • Highly precise height measurements facilitated by NX electronic controller without any need for software processing

Best Tip Life, Resolution, and Sample Preservation by True Non-Contact Mode

  • Rapid Z-servo speed allowing True Non-Contact Mode
  • Minimum tip wear for extended high-quality and high-resolution imaging

Versatile Range of Modes and Options

  • Extensive set of measurement modes and characterizations
  • Advanced electrical measurements available for failure analysis (FA)
  • Extended abilities with optional accessories and upgrades

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