Park NX20 300 mm AFM for Wafer Measurement and Analysis

The Park NX20 300 mm is the industry’s first large sample AFM that supports a fully motorized traveling range of 300 x 300 mm. It is designed for quality control and failure analysis laboratories.

This new, upgraded Park NX20 system can inspect a whole 300 mm wafer efficiently, without the need for sample displacement.

Although the system has an enlarged platform to support the 300 mm motorized XY stage, Park's novel vibration isolation technology keeps the system noise level less than 0.5 Å RMS, or typically 0.3 Å RMS, in the field. Well established AFM performance and SingleClick-AFM automation remove any need for sample modification and make the Park NX20’s scanning process as user-friendly and efficient as possible.

With Park's Program Mode interface, users can effortlessly implement repeatable and reliable sequential multiple-site measurements across the whole 300 x 300 mm area. This makes the Park NX20 300 mm the top choice for QA, FA and QC engineers that need to scan large samples.

Specifically Built for Large Sample Wafer Inspection

The Park NX20 300 mm is designed specifically for optimal measurements of large samples. The whole 300 mm wafer area can be tested for low-noise AFM measurements. This opens up a whole new range of measurement automation, allowing engineers to work faster, more simply and with better precision.

Flexible 300 mm Sample Chuck

The vacuum chuck in the Park NX20 300 mm supports a broad range of wafer shapes, sizes and types allowing users to accurately scan practically any sample.

300 mm XY Stage

The motorized 300 mm XY stage allows users to move the AFM measuring position within the whole 300 mm area.

Proven Park NX20 Performance with a 300 mm Sample Stage

The Park NX20 is already the best choice for QA, FA and QC engineers as it offers them unparalleled ease of use and automation without losing accuracy. An enlarged platform that supports a 300 mm motorized XY stage enables the system to allow users to analyze larger samples easily and with very high accuracy.

Park SmartScan™ Makes Getting Accurate Measurements Simple

The Park NX20 is fitted with the Park SmartScan OS, thereby making it one of the easiest-to-use AFMs available on the market. With a smart but very powerful interface, even untrained users can rapidly scan a large sample without supervision. This enables senior engineers to use their skills to solve bigger problems and develop better solutions.

a) Scan Multiple Sites on the Entire 300 mm Wafer

With Park SmartScan’s Program Mode, users can take automated sequential site measurements, compare height, surface morphologies, surface roughness from site-to-site and sample-to-sample using wafer and grid-based modes. This can significantly enhance productivity and user-convenience when scanning large samples.

b) Powerful Recipe Creation

Park’s simple recipe creation process allows engineers to fix preset scan parameters defined by name, location, type and number on each batch.

Optimized for a Wide Range of Applications

The Park NX20 300 mm provides recipe-automated AFM measurement for several applications providing analysis of samples and advanced measurements at the nanoscale. With the ability to measure height, roughness, depth, conduct defect reviews, thermal property characterization, magnetic and electrical failure analyses and nanomechanical property imaging, this AFM is best suited to a broad range of tasks performed by QA, FA and QC engineers that work with large samples.

Specification

The main specifications of the Park NX20 300 mm AFM are as follows:

   
Scanner XY scanner: 100 µm × 100 µm
Z scanner: 15 µm, (30 µm optional)*
Stage XY travel range: 300 mm x 300 mm
Z travel range: 25 mm
Focus travel range: 15 mm
Precision encoder for all axes* (optional)
Electronics ADC: 18 channels
4 high-speed ADC channels (50 MSPS)
24-bit ADCs for X, Y, and Z position sensor

DAC: 12 channels
2 high-speed DAC channels (50 MSPS)
20-bit DACs for X, Y, and Z positioning
3 channels of integrated lock-in amplifier
Vision Direct on-axis vision of sample and cantilever
Coupled with 10x objective lens (20x optional)*

Field-of-view: 480 x 360 µm
CCD: up to 5Mpixel
Sample Mount & Size Vaccum groove holder:
100, 150, 200, 300 mm wafers, small sample Magnetic sample holder Up to 20 mm thickness
Physical Information Dimension (enhanced acoustic enclosure):
1220 mm (W) × 1170 mm (D) × 1470 mm (H)
Software Park SmartScan AFM system control and data acquisition software
Auto mode, Manual mode
Program mode for recipe-automated, sequential multiple-site measurement AFM operation
Options/Modes* Various options are available for wide range applications

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