Park Systems’ latest innovation in Atomic Force Microscopy, the Park FX200, is tailored for 200 mm samples. Its advanced mechanical structure ensures significantly lower noise levels, minimal thermal drift, and exceptional stability. The FX200 sets a new standard for precision and reliability, with enhanced Z servo performance and improved high-power sample viewing for better operational efficiency and imaging capabilities.
Features like automatic probe detection and exchange, laser beam alignment, and macro optics for full sample viewing enhance the user experience and productivity. With optical autofocus, navigation, and sequential measurements at multiple coordinates, the FX200 simplifies complex tasks. It also supports automated AFM scan parameter sets and data analysis, making it an ideal choice for research and industrial applications.
The Park FX200, with its enhanced performance and user-friendly design, is set to revolutionize nanoscale imaging and analysis. It empowers scientists and engineers to make groundbreaking discoveries and advancements.
Streamline the Research
Park FX200 | The most advanced AFM for samples from small sizes up to 200 mm
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Enhanced AFM Core Technology
Lower Noise Floor and Minimal Thermal Drift
The enhanced mechanical structure reduces operational noise and thermal drift, enabling a more precise SLD beam point that surpasses previous limitations. This leads to improved measurement accuracy and higher-resolution images.
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Small Laser Spot Size
- The laser spot size is relatively small since the SLD beam is focused by an objective lens
- SLD beam diameter of 11 µm allows for faster imaging with cantilevers
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Faster Z servo performance
- Propelled by a high-force piezoelectric stack and guided by a flexure framework
- The new FX AFM electronic controller enables faster Z servo performance with more accuracy
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The Most Accurate AFM Scanning Mode Ever
The True Non-contact™ Mode provides previously unheard-of control over tip-sample distance at the sub-nanometer scale.
The Park FX200 is the industry’s fastest and most precise non-contact AFM.
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Handles Wafers and Multiple Samples
It is designed for industrial applications and can handle wafers up to a range of sample sizes, including wafers up to 200 mm.
Up to 16 coupon samples can fit in the vacuum chuck, allowing for a variety of investigations in a single configuration.
Full 200 mm Wafer Support
Wafers up to 200 mm in size can be accommodated, which is crucial for materials science research and semiconductor fabrication. The vacuum chuck increases efficiency and adaptability by guaranteeing steady placement for accurate measurements and high-resolution photography.
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Holds up to 16 Coupon-Sized Samples
Up to 16 coupon-sized samples can be held in the vacuum chuck at once, increasing productivity by enabling a variety of experiments in a single setup. This capability is perfect for labs that evaluate several samples quickly, since it minimizes downtime and maximizes efficiency.
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Intelligent Automation
It increases efficiency by automating crucial processes like laser alignment, parameter adjustment, and probe recognition and exchange. It has 16 probe slots for repeated measurements and mode switches to decrease downtime and increase efficiency.
Automatic Probe Type Recognition
The Probe Identification Camera detects the QR code imprinted on the chip carrier of a new probe. It displays all relevant information about each tip, such as kind, model, application, and usage. This enables the quick selection of the optimal probe tip for each work, assuring precision and efficiency.
Automatic Probe Exchange
Automated probe exchange allows for the easy and safe replacement of outdated probes. It has 16 probe slots for repetitive measurements and mode changes, eliminating downtime and enhancing efficiency by switching probes quickly and automatically.
Automatic Laser Beam Alignment
Automatic Beam Alignment directs the laser beam to the right location on a cantilever and optimizes the spot’s vertical and lateral position on the PSPD. It automatically moves the X, Y, and Z axis for sharper images with no distortion with the push of a button.
Simplified Operation
Automatic Focus and Navigation
Advanced Region of Interest (ROI) Zooming uses a broad field-of-view sample camera to display the whole 200 mm wafer, making analysis easier by allowing for quick, precise positioning. This decreases the time required to discover target locations, ranging from broad survey scans to specific magnifications. Furthermore, the improved optical vision provides remarkable clarity, resolving line widths below 1 µm.
Automatic Sequential Measurements
It enables the automated execution of predetermined coordinate settings on big samples, such as 200 mm wafers or multi-sample chucks. It allows for sequential measurements, including topography and advanced modes, and simplifies workflows in research and industrial applications.
Next-Generation AFM Controller for High-End Products
The Park FX Controller was created especially to improve the Park FX Series' performance. This important advancement makes Advanced Piezoresponse Force Microscopy (PFM) applications, like Contact Resonance PFM (CR-PFM) and Dual-Frequency Resonance Tracking (DFRT-PFM), possible without requiring extra hardware. This guarantees that users may benefit fully from the most recent developments in atomic force microscopy.
- DFRT-PFM Without External Amplifiers
- Direct CR-PFM enablement with greater bandwidth for tip bias modulation
- Improved security and continuous environmental surveillance
- Faster data and image processing with faster Ethernet connectivity
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Park nano-IR Spectroscopy
Advanced Nano-IR Spectroscopy for Large Sample Chemical Analysis
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The Park nano-IR system combines atomic force microscopy (AFM) and infrared (IR) spectroscopy. The spectroscopic portion provides chemical identification with a spatial precision of 5 nm. It employs a non-contact method with the highest industry spatial resolution and the safest spectroscopic scanning. The microscopy portion gives the user information on mechanical properties and nanoscale 3D topography with sub-angstrom height accuracy.
Applications
Perfect for Diverse Applications
AFM Image Gallery. SRAM. Image Credit: Park Systems Corp
AFM Image Gallery. tBG/hBN. Image Credit: Park Systems Corp
AFM Image Gallery. Organic SAM. Image Credit: Park Systems Corp
AFM Image Gallery. Aluminum alloy. Image Credit: Park Systems Corp
AFM Image Gallery. Cu pad. Image Credit: Park Systems Corp
AFM Image Gallery. C36 alkanes. Image Credit: Park Systems Corp