Nanofabrication News

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UCSC Awarded Prestigious Keck Foundation Grant to Establish W. M. Keck Center for Nanoscale Optofluidics

Tegal Receives Order for DRIE 3200 Multi-Module Cluster Tool from High Volume Manufacturer of MEMS Sensors

Tegal Receives Order for DRIE 3200 Multi-Module Cluster Tool from High Volume Manufacturer of MEMS Sensors

Using Nanotechnology to Develop Intelligent Materials that are Better Accepted by the Human Body

Leading Provider of Stamps for Nanoimprint Lithography Announces New Collaboration

Leading Provider of Stamps for Nanoimprint Lithography Announces New Collaboration

SCI Engineered Materials Enters into $1 Million Business Loan Agreement

SCI Engineered Materials Enters into $1 Million Business Loan Agreement

Air Liquide Electronics Announce Major Capacity Expansion of TORUS Manufacturing at ALOHA TM Facility

Achievement Paves Way for Manufacturing Reliable Electronic Nanocircuits at the Nanoscale

Achievement Paves Way for Manufacturing Reliable Electronic Nanocircuits at the Nanoscale

Another MEMS PVD Win for Tegal, the Leader in Stress Controlled Metal Film Deposition for MEMS Fabrication

Nanotechnology Facility Receives 5-Year Renewal Grant from NSF

Nanotechnology Facility Receives 5-Year Renewal Grant from NSF

University of Helsinki and ASM International Renewed Long-Term Research Agreement on ALD

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