Posted in | Nanoenergy | Nanofabrication

Cambridge NanoTech Introduces Self-Assembled Monolayers Feature to Upgrade ALD Systems

Cambridge NanoTech has introduced the capability of self-assembled monolayers (SAMs) in an attempt to upgrade Savannah Atomic Layer Deposition (ALD) systems. SAMs are helpful in various fields such as electronics, microelectromechanical systems (MEMS), biology, electrochemistry, nanoelectromechanical systems (NEMS), and household products.

This multipurpose, less expensive coating is used in several applications like chemical resistance, bio-compatibility, wetting and adhesion control, molecular recognition for sensors and nano fabrication, and sensitization.

Cambridge NanoTech enable SAMs coatings on 100, 200, and 300mm size base or smaller. Cambridge NanoTech presents customers having Savannah ALD systems to upgrade to be equipped with the SAMs feature. The cost of including the SAMs feature to prevailing and new Savannah systems is cost-efficient than a deposition device that wholly relies on SAMs coating available in the market.

Ganesh Sundaram, Vice President of technology stated that SAMs offers the ALD community with opportunities to explore their research further. Due to the ability of depositing SAMs films and ALD in a single chamber, SAMs coating technology render more functionalities than any other coating technologies, he added.

Cambridge NanoTech will display a Savannah system with SAMs functionality at the American Vacuum Society's ALD conference 2011, at the Royal Sonesta, Cambridge, Massachusetts.


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