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OU to Acquire Veeco’s New GENxplor R&D Molecular Beam Epitaxy System

Veeco Instruments Inc. announced today that the University of Oklahoma (OU) will receive the first shipment of Veeco’s new GENxplor™ R&D Molecular Beam Epitaxy (MBE) System early in the fourth quarter. The GENxplor is a fully integrated deposition system that creates high quality epitaxial layers on substrates up to 3” in diameter and is ideal for cutting edge research on a wide variety of materials including GaAs, nitrides, and oxides.

“The University of Oklahoma is proud to be the first university in the world that will have the new GENxplor,” said Dr. Michael Santos, University of Oklahoma Professor in Engineering Physics. “The proven growth chamber and enhanced features of the GENxplor, including robust process flexibility and convenient access to effusion cells, are ideal for the materials research we are conducting for technologies such as lasers, photo detectors, and solar cells. We have two other Veeco MBE systems in our lab that have performed very well.”

In addition to receiving the first tool, Dr. Santos is scheduled to discuss his latest MBE research at the North America MBE Conference (NAMBE), occurring today in Banff, Canada.

“The University of Oklahoma is at the forefront of compound semiconductor materials research, so it is quite fitting that they are receiving the first GENxplor,” commented Jim Northup, Vice President, General Manager of Veeco’s MBE Operations. “It has been designed specifically for the R&D community, combining an easy to use platform with our world-class MBE performance.” Please visit this link for more information about Dr. Santos’ III-V research focus areas:

About GENxplor

Veeco's GENxplor features an efficient single frame design that combines all vacuum hardware with on-board electronics to make it up to 40% smaller than other MBE systems, saving valuable lab space. Because the manual system is integrated on a single frame, installation time is reduced. The open architecture design of the GENxplor also improves ease-of-use, provides convenient access to effusion cells, and allows easier serviceability when compared to other MBE systems. When coupled with Veeco’s recently introduced retractable sources, the GENxplor system represents the state-of-the-art in oxide materials research.

About Veeco

Veeco’s process equipment solutions enable the manufacture of LEDs, flexible OLED displays, power electronics, hard drives, MEMS and wireless chips. We are the market leader in MOCVD, MBE, Ion Beam and other advanced thin film process technologies. Our high performance systems drive innovation in energy efficiency, consumer electronics and network storage and allow our customers to maximize productivity and achieve lower cost of ownership. For information on our company, products and worldwide service and support, please visit


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