EV Group (EVG) is a leading supplier of high-volume production equipment and process solutions for the manufacture of semiconductors, MEMS, compound semiconductors, power devices and nanotechnology devices.
A recognized market and technology leader in wafer-level bonding and lithography for advanced packaging and nanotechnology, EVG’s key products include wafer bonding, thin-wafer processing and lithography/nanoimprint lithography (NIL) equipment, photoresist coaters, as well as cleaning and inspection/metrology systems.
With state-of-the-art application labs and cleanrooms at its headquarters in Austria, as well as in the U.S. and Japan, EVG is focused on delivering superior process expertise to its global R&D and production customer and partner base – from the initial development through to the final integration at the customer’s site.
Founded in 1980, EVG services and supports an elaborate network of global customers and partners all over the world, with more than 1000 employees worldwide and fully-owned subsidiaries in the U.S., Japan, South Korea, China and Taiwan.
EVG SmartNIL Imprint Technology
Nanoimprint Lithography Competence Center for Photonic Applications
UV Nanoimprint Solution for Nanopatterning
Microfluidics Processing - Solutions for Fabrication and Packaging
Imprint Lithography for Functional Layers
Wafer Level Optics - Introduction and Solutions Available for Wafer Level Optics
UV-Nanoimprint Lithography - Overview and Systems Available for UV-Nanoimprint Lithography
Hot Embossing Technology - Low Cost, Flexible Fabrication Method for Nanoimprinting Patterns on Polymer Substrates by EV Group
Developing Nanoimprint Lithography (NIL) Processes with Expert Assistance
EV Group Expands Collaboration with ITRI on Heterogeneous Integration Process Development
Ev Group Brings High-Speed Metrology to 3D Heterogeneous Integration
The HERCULES®NIL Fully-Integrated UV Nanoimprint Lithography Track Solution from EV Group
EVG®7200 Automated UV Nanoimprint Lithography System
EVG®720 Automated UV Nanoimprint Lithography System
EVG120 Automated Resist Processing System for Micro- and Nano-Electronics
EVG540 Automated Wafer Bonding System from EV Group
Automated Nanoimprint Lithography Stepper - The EVG770 NIL Stepper from EV Group
Automated Nanoimprint Lithography System - The EVG6200 Infinity from EV Group
Automated UV-NIL Nanoimprint Lithography System - The IQ Aligner from EV Group
Semi-Automated Hot Embossing System - The EVG520HE from EV Group