The December 23, 2002 issue of Applied Physics Letters reports on research from Hosei University into onboard power supplies for nano devices and biochips.
The researchers made tiny batteries by etching 200 x 100 x 2-micron trenches into silicon chips and then filled the trenches with a porous glass electrolyte and lithium and lithium manganese oxide electrodes. Lithium ions move through the glass from one electrode to the other to produce current. They also added nano-sized pores to the glass. This increased the flow of lithium ions and therefore also increased the power of the battery.