Semiconductor Loadports Enhance Hygiene and Performance

California-based Crossing Automation has recently unveiled a range of adaptive standard mechanical interface (SMIF) loadport (LPT) systems at the tradeshow SEMICON in China.

The solutions are suitable for open cassette 200mm process, metrology and examination tools. They are cost-efficient upgrades of non-SMIF tools to SMIF. This facilitates the changeover from existing 200mm facilities for semiconductor production at technology nodes less than 180nm.

The three configurations target OEM tool configurations with complex cassette landing stages. The SMIF-LPT Tr is a rotational head that allows cassettes to be placed in a non-perpendicular method. The SMIF-LPT Tx delivers the cassettes to move in a lateral direction to solve narrow cassette-to-cassette space constraints. The SMIF-LPT Ty features an offset arm that has narrow compartment openings. It is also possible to integrate these features into a current SMIF-LPT. All the solutions ensure an enhanced particle performance for Class 1 performance in a Class 100 hygienic surrounding.