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MOCVD Systems for Enhanced LED Production

Veeco Instruments recently declared that United LED Shan Dong (ULED), a China-based collaboration between United Microelectronics (UMC) and Epistar has placed an order with Veeco for supply of its TurboDisc K465i Metal Organic Chemical Vapor Deposition (MOCVD) Systems.

The company will install the platforms at ULED’s plant in Jining City in China. The systems will be deployed in the high brightness light emitting diode (HB LED) production ramp.

Dr. Tzu-Chi Wen, vice president of Epi factory at United LED, said high consistency on repeated operations, allows the K465i to deliver ease-of-tuning essential for rapid optimization on wafers measuring up to 8inches.

Bill Miller, executive vice president, Compound Semiconductor, who heads Veeco's MOCVD Operations added that the solutions deliver strategic benefits such as high capital efficiency and outputs. They also allow mechanics to recover tools rapidly after maintenance.



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