ASM International, a manufacturer of materials and equipment for fabricating semiconductor devices, has shipped more than 500 atomic layer deposition (ALD) reactors that are utilized in semiconductor production till date.
At present, the company has ALD reactors that aid in manufacturing huge quantity of semiconductors at memory and logic fabs all over the world. ASM has also shipped the plasma enhanced ALD that offers benefits such as processing at very low temperatures for specific applications.
ASM ships both batch ALD and single wafer tools and offers a vast product range of ALD applications and configurations. The company’s plasma and thermal ALD solutions are used in bulk production for numerous applications, which include high-k and metals for next-generation transistor gates, double patterning spacers, and electrodes and capacitor dielectrics.
ASM, by acknowledging the significance and worth of ALD for semiconductor fabrication, has set up ALD centers of excellence focused on ALD’s in Asia, United States, and Europe. The centers offer process integration, product development, precursor and material research capabilities. They feature sophisticated in-house R&D programs that enable the company to deliver ALD both plasma and thermal for bulk production. They also enable the customers to attain the necessary performance for next-generation semiconductor equipment.
Source: http://www.asm.com/