Marvell Nanofabrication Laboratory Orders sp3 Diamond Technologies’ HF CVD System

sp3 Diamond Technologies, a provider of diamond deposition reactors, products and services, has dispatched its Model 655D Series hot filament (HF) chemical vapor deposition (CVD) diamond reactor system to the Marvell Nanofabrication Laboratory of the University of California, Berkeley (UC Berkeley).

The Marvell Nanofabrication Laboratory will use the Model 655D system to create diamond MEMS structures for micromechanical resonators used in radio frequency filters. The HF CVD diamond reactor is designed for depositing diamond onto manifold silicon wafers of 6" diameter. The system can produce superior-quality, homogenous polycrystalline diamond films having a thickness range between 100 nm and 50 µm, with high thermal conductivity and thermal diffusivity. It fabricates a variety of rough and smooth textured films for electronic, MEMS, abrasive and low friction applications, and supports boron-doping to fabricate conductive films.

The Berkeley Marvell Nanofabrication Laboratory’s Executive Director, Dr. Bill Flounders stated that the Model 655D system will enable the Berkeley NanoLab to illustrate the fabrication of superior-quality, low-stress, cost-efficient thin diamond films for MEMS devices such as MEMS resonators and identify other uses of these films in several other applications.

sp3 Diamond Technologies’ President and Chief Executive Officer, Dwain Aidala stated that the global diamond community is aware about the use of diamond films in high-frequency resonators. The UC Berkeley order confirms the capability of diamond films for use in innovative MEMS applications. It also illustrates how the company’s materials expertise and its novel hot filament diamond deposition technology has enabled wide acceptance of its diamond films in numerous markets.


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