Major Chip Manufacturer Places Order for Axcelis GSD Series High Performance End Station Upgrade

Axcelis Technologies, Inc., a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that it has received a multiple system upgrade order from a leading semiconductor manufacturer based in Asia for Axcelis' new GSD Series High Performance End Station upgrade, designed to significantly enhance system productivity and process performance.

The order is valued over $1.4 million. The foundry deployed the upgrade to increase manufacturing capacity in order to meet customer demand, and immediately realize lower operating costs.

"For over 35 years, Axcelis has been committed to providing long term value to our customers," said Robert Mahoney , vice president, global service solutions and quality for Axcelis. "Our award winning Global Support Solutions program is designed to optimize implanter productivity and process capabilities, to maximize the return on their capital investment. A key component of this program is our Performance Upgrades program, which allow for the continuous improvement of our customers' installed base. The new High Performance End Station upgrade is doing just that, with customers in high volume production reporting significantly improved productivity, higher reliability, measurably reduced particulate levels and enhanced yield."

High Performance End Station Upgrade

The GSD Series High Performance End Station upgrade is one of over 1,000 Axcelis upgrades designed to increase productivity, improve yield, reduce cost of ownership and extend system lifecycle. The High Performance End Station upgrade includes innovative new in-vacuum wafer handling hardware that reduces wafer transfer time for increased productivity, and improves wafer handling precision and repeatability which greatly influence yield. New features also streamline set-up and alignment for ease of maintenance. This upgrade is available for the GSD platform high current and high energy systems, as well as many SEN implanters. For more information this upgrade, and many others, please visit the company's Knowledge Center or contact an Axcelis account representative.


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