Posted in | Nanoelectronics

Cabot Microelectronics’ Novus A7100 Aluminum CMP Slurry Adopted for 28/20 nm High-K Metal Gate Integration

Cabot Microelectronics Corporation, the world's leading supplier of chemical mechanical planarization (CMP) polishing slurries and a growing CMP pad supplier to the semiconductor industry, today announced that its Novus A7100 Aluminum CMP slurry products have been adopted by several leading edge customers to help enable 28/20 nanometer High-K Metal Gate integration schemes used for advanced logic devices.

The Novus A7100 Aluminum slurry product platform is the result of Cabot Microelectronics' industry-leading CMP technology and extensive research and development in close collaboration with strategic customers. Novus A7100 contains a combination of unique engineered abrasive particles and proprietary chemistry to remove aluminum and the complex stack of work-function metals within the transistor gates of advanced semiconductor logic devices. This CMP solution was designed to polish aluminum and then stop on the underlying dielectric material and therefore minimize dielectric material erosion and aluminum recess. Novus A7100 is formulated to optimize removal rate, limit erosion and recess, and meet low defect requirements.

Charles Chen, Cabot Microelectronics' Global Business Director, stated, "The Novus A7100 Aluminum CMP slurry provides our customers with a solution for a critical process step in enabling High-K Metal Gate device integration at advanced technology nodes. We believe the extremely low recess levels that can be achieved across a wide range of feature sizes and densities, results in better device reliability and transistor performance."


Cabot Microelectronics Corporation, headquartered in Aurora, Illinois, is the world's leading supplier of CMP polishing slurries and a growing CMP pad supplier to the semiconductor industry. The company's products play a critical role in the production of advanced semiconductor devices, enabling the manufacture of smaller, faster and more complex devices by its customers. The company's mission is to create value by developing reliable and innovative solutions, through close customer collaboration, that solve today's challenges and help enable tomorrow's technology. Since becoming an independent public company in 2000, the company has grown to approximately 1,050 employees on a global basis. For more information about Cabot Microelectronics Corporation, visit or contact Trisha Tuntland, Manager of Investor Relations at 630-499-2600.


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