Aviza Technology, Inc., a supplier of advanced semiconductor capital equipment and process technologies for the global semiconductor industry and related markets, today announced it has received an order for its Celsior™ single-wafer atomic layer deposition (ALD) system from SVTC Technologies, a U.S.-based process development foundry for established and start-up semiconductor companies. SVTC is installing this capability for its customers who have requirements for ultra-thin high-k and metal films for Flash, non-volatile memory and high-voltage applications.
Aviza’s Celsior ALD system is the process tool of record used by leading DRAM manufacturers in China, Taiwan, Europe and the U.S. for select applications in high-volume production today. This SVTC order marks a significant milestone, as it demonstrates the potential for Aviza’s ALD process and technology capabilities outside of the traditional DRAM market into other areas such as Flash and nanotechnology applications.
“SVTC’s customers are pushing the envelope in process and materials development and the capabilities of the Celsior ALD system will allow them to continue on their development roadmaps well into the future,” said Bert Bruggeman, SVTC’s VP of Operations and General Manager. “We selected the Celsior because of the flexibility it offers to our customers’ development teams.”
“Aviza is pleased that our production-proven Celsior ALD system was selected by SVTC,” said Subrata Chatterji, Vice President and General Manager, ALD Business Unit of Aviza Technology, Inc. “Placing a tool at SVTC enables Aviza to extend its ALD technology to SVTC’s diverse customer base and also allows Aviza to expand the reach of its process and technology capabilities outside of the traditional DRAM market to other key markets such as Flash.”