Nov 7 2007
The companies AMD, Carl Zeiss SMT and Qimonda are launching a cooperation within the framework of the joint “Nanoanalysis“ project which is funded by the German Federal Ministry of Education and Research (BMBF) with a sum of 12 million euros. The partners are working together on new analytical and characterization methods required for the development of the next chip generation. This strengthens the competency of the Dresden microelectronics site, particularly in the fields of semiconductor analysis and metrology.
As announced today by Dr. Wolf-Dieter Lukas, Head of the BMBF Department “Key Technologies – Research for Innovations“, the strategic setup and expansion of microelectronics competency centers is an important goal of the BMBF IKT2020 program. “Only by setting targeted priorities in research funding will we succeed in maintaining Dresden’s leading role in high-tech chip production and in further expanding it through such innovative approaches as here in the field of nanoanalysis.“
The newly founded “Carl Zeiss Innovation Center Dresden“ is an important module within the joint “Nanoanalysis“ project. Here, ultrahigh resolution particle beam systems are being installed which use electron and ion beams instead of light. These systems enable the imaging, analysis and processing of specimens down to the level of individual atoms. In this way, they are playing a decisive role in the characterization of three-dimensional semiconductor structures and in the development of new materials for chip fabrication. “With its Innovation Center, Carl Zeiss SMT is becoming involved in ‘Silicon Saxony’, Europe’s leading microelectronics cluster. Not only is the cluster being strengthened in its function as a research location, but the ongoing development of the local semiconductor industry is also being promoted”, explains Dr. Dirk Stenkamp, Member of the Carl Zeiss SMT Board of Management.
“As a manufacturer of innovative microprocessors, we are faced with the challenge of producing increasingly complex structures with smaller and smaller dimensions and with maximum yield“, says Dr. Udo Nothelfer, Vice President AMD Fab 36. “Therefore, process control at an atomic level plays a key role. Through our joint work in the Carl Zeiss Innovation Center Dresden, we have access to leading edge electron and ion microscopes and believe we can therefore further accelerate the introduction of new technologies. The experience gained in industrial utilization may be incorporated at an early stage in the development of future analytical systems.“
“With the structure dimensions now achieved, current storage cells can only be seen under the electron microscope“, says Frank Prein, Managing Director Qimonda Dresden and Senior Vice President Technology Qimonda. “Only through the consistent enhancement of the analytical and measuring methods will it be possible to master the future challenges posed by the development and production of state-of-the-art storage technologies. Through the diversified integration of research partners, Qimonda will use the excellence of the research location for its technology competency center in Dresden within the framework of the joint ‘Nanoanalysis’ project and expand and strengthen its scientific network.“
In addition to the cooperation partners AMD and Qimonda, the “Carl Zeiss Innovation Center Dresden“ is available to all interested firms and institutes in the Dresden area. In particular, all partners of “Silicon Saxony”, e.g. the Dresden Technical University or the Fraunhofer Center Nanoelectronic Technologies CNT, can resolve application problems in the field of nanotechnology.