Several New Large Angle Piezo Beam Steering Mirror Platforms Launched by PI to Provide Larger Angles, High Bandwidth and Stability

Physik Instrumente a leading manufacturer of nanopositioning and piezo-based precision motion-control equipment for bio-nanotechnology, photonics and semiconductor applications—has extended the S-330 high-dynamics piezo tip/tilt platform family by several new large-angle models.

S-330 piezo sterring mirror platforms shown with a closed-loop OEM piezo controller

Features & Advantages:

  • Six Closed Loop & Open Loop Models for Mirrors up to 50 mm Diameter
  • Optical Beam Deflection to 20 mrad (>1°)
  • > 3kHz Resonant Frequency for Sub-Millisecond Step Response
  • Resolution to 20 nrad — Excellent Position Stability
  • Parallel-Kinematics Design for Higher Dynamics, Stability & Linearity
  • Closed-Loop Versions for Better Linearity
  • Differential Drives for Excellent Temperature Stability

Typical Applications

  • Beam correction, laser surgery, image stabilization, interlacing, dithering, laser scanning / beam steering, optical communications, high resolution microscopy / spectroscopy
  • 2-Axis, Flexure Guided, No Polarization Rotation
  • S-330 steering mirror platforms provide precise angular tip/tilt motion of the top platform around two orthogonal axes. These flexure-guided, piezoelectrically driven systems can provide higher accelerations than other actuators, enabling step response times in the sub-millisecond range.
  • The single pivot-point design also prevents the drawback of polarization rotation, which is common with conventional 2-axis stacked systems, e.g. galvo scanners.
  • Closed-loop and open-loop versions with 3 different tilt ranges up to 10 mrad (20 mrad optical deflection) are available.

Parallel-Kinematics: Smaller with Improved Stability, Linearity & Dynamics

PI piezo steering mirrors are based on a parallel-kinematics design with coplanar rotational axes and a single moving platform driven by two pairs of differential actuators. The advantage is jitter-free, multi-axis motion with excellent temperature stability. Compared to stacked (two-stage), mirror scanners, the parallel-kinematics design provides symmetrical dynamic performance in both axes with faster response and better linearity in a smaller package.

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