Light Coupling Mask (LCM) Nanolithography - A Basic Look At The LCM NanoLithographic Technique and It’s Advantages

Sep 25 2006

Topics Covered

Background

Several lithographic techniques are used for patterning in the nanoscale region. Light coupling mask (LCM) nanolithography is a variation on the commonly used technique of photolithography.

Light Coupling Nanolithography (LCM)

In LCM a polymer mask is placed in contact with the photoresist. Transparent regions protrude through the topographically patterned mask where exposure is required. The contrast of masked areas can be further increased with the application of a thin gold layer.

AZoNano - The A to Z of Nanotechnology - Cross section through showing how the light coupling mask works

Figure 1. Cross section through showing how the light coupling mask works

Advantages

Nanolithography with a LCM does away with the need for sophisticated optics. This results in a lower cost process but still is a high-density, high-resolution optical nanolithography technique.

Source: AZoNano

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