Ultratech, Inc., a leading supplier of photolithography systems used to manufacture semiconductors and nanotechnology devices, today announced that it has received orders for its NanoTech 160 dual-side alignment (DSA) stepper and a reduction stepper from the Infotonics Technology Center (Canandaigua, N.Y.). Infotonics, a not-for-profit corporation established in 2001 that operates New York State's Center of Excellence in Photonics and Microsystems, plans to use the steppers for microelectromechanical systems (MEMS) and micro-optoelectromechanical systems (MOEMS) research and development applications.
Infotonics' corporate members include Corning, Inc., Eastman Kodak Co. and Xerox Corp.; and academic participants include 20 New York state colleges and universities. Infotonics' chief operating officer, Dr. Bill Hawkins, noted, "Ultratech's steppers were chosen because of their tremendous versatility and reliability for MEMS and MOEMS applications in both R&D and production environments. In addition, Ultratech has custom-configured the NanoTech 160 with a broadband lens, further extending our capabilities as we strive to enable rapid commercialization of new products."
Ultratech's NanoTech 160 features a proprietary broadband 1X optical system, which allows processing of both g-line and i-line photosensitive films. The dynamic focus capability enables exposure of both thin and thick films, extending the tool's capability for MEMS/MOEMS applications.
"Ultratech is the leader in providing lithography solutions designed to address customers' specific needs associated with manufacturing MEMS/MOEMS and nanotechnology devices," explained Doug Anberg, Ultratech's vice president of product marketing. "Our historical commitment to meeting customers' stringent performance and flexibility requirements has provided us with the opportunity to play a significant role in the establishment of Infotonics' unique R&D facility. We look forward to ongoing collaboration with Infotonics to help them exceed their MEMS and MOEMS R&D goals."