Integrated Sensing Systems Orders Pegasus DRIE System from Surface Technology Systems

Surface Technology Systems plc (STS), the market leader in deep silicon etching for the growing advanced packaging and MEMS market, today announced that they have sold a Pegasus DRIE system to Integrated Sensing Systems.

ISSYS was established in 1995 to design, develop, manufacture and commercialize innovative products based on high performance MEMS. Nader Najafi, founder of ISSYS stated, "As our technology has matured, we have succeeded in developing micro devices for industrial, medical, and fuel cell applications. For many years, STS silicon etch technology has been a key enabling process for our research and development, and this Pegasus tool will provide us with the manufacturing capability we now require as we ramp up production. The tool will also allow us to offer high-volume manufacturing to our MEMS foundry customers."

Eizo Yasui, CEO of STS replied, "This order is yet another example of how STS' long-term relationships with research groups and small start-ups can enable a smooth transition to MEMS production when innovations developed in the lab are eventually brought to market."

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