SPTS Technologies designs, manufactures, sells, and supports etch, deposition and thermal capital equipment, providing advanced wafer processing technologies for the microelectronics industry. End-market applications include micro-electromechanical systems (MEMS), nanotechnology, advanced packaging, LED, high speed RF device IC’s and power semiconductors.
Formed in 2009, SPTS brings together over 40 years wafer processing experience from companies including Watkins-Johnson, Trikon Technologies, STS, and Aviza Technology. The solutions offered by SPTS include market-leading silicon etch, dielectric etch, HF and XeF2 dry-release etch, PVD, PECVD, APCVD and large batch vertical furnaces. SPTS supplies wafer processing equipment and technologies to the world's leading semiconductor device manufacturers and research institutions, offering dedicated local sales and customer support through a network of international offices and agents.
SPTS Enters Agreement with CEA-Leti to Develop 3D High Aspect Ratio Through-Silicon-Via Solutions
SPTS Technologies Launches Rapier XE System for 300mm Wafer Silicon Etching
STS Receives Order for Pegasus DRIE System from University of Michigan
Surface Technology Systems Sold Two ICP Systems to UNAM
Dr. Seb Leaper, Dr. Ahmed Abdelkarim
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