Leti announced today that
the spring meeting of the European Chemical Mechanical Planarization (CMP) Users
Group will be April 30, 2010, on the Minatec campus in Grenoble.
Formerly the German CMP Users Group, the new organization has been expanded
to encourage the participation of CMP users from throughout Europe. This marks
the first time the workshop, sponsored by Ebara Europe and STMicroelectronics
Crolles, has been held outside of Germany.
For more information about attending and presenting papers at this workshop,
contact Gerfried Zwicker, head of the European CMP Users Group at [email protected]
The European CMP Users Group provides a neutral forum for exchanging the latest
results, new developments and long-time experience in CMP, an enabling technology
for manufacturing state-of-the-art microelectronic circuits and MEMS devices.
The group’s members, who represent chipmakers, equipment and materials
companies, research organizations and university institutes, meet twice a year
for presentations, discussions and networking.
CEA is a French public research and technology organization, with activities
in four main areas: energy, information technologies and healthcare technologies,
defence and security. Within CEA, the Laboratory for Electronics & Information
Technology (CEA-Leti) works with companies in order to increase their competitiveness
through technological innovation and transfers. Leti is focused on micro and
nanotechnologies and their applications, from wireless devices and systems,
to biology and healthcare or photonics. Nanoelectronics and microsystems (MEMS)
are at the core of its activities. As a major player in the MINATEC excellence
centre, Leti operates 8,000-m² state-of-the-art clean rooms, on a 24/7
schedule, on 200mm and 300mm wafer standards. With 1,200 employees, Leti trains
more than 150 Ph.D. students and hosts 200 assignees from partner companies.
Strongly committed to the creation of value for the industry, Leti puts a strong
emphasis on intellectual property and owns more than 1,400 patent families.
In 2008, contractual income covered more than 75 percent of its budget worth