New Optical Profiler from Taylor Hobson Supports Thin- and Thick Film Measurements

The new CCI SunStar merges world leading non-contact dimensional measurement capability with advanced thin and thick film technology.

Talysurf CCI delivers results you can trust with industry leading performance.

• Film thickness measurement from 5 ìm down to 300 nm or less
• 4 million pixel camera for high resolution imaging over a large area
• Auto-range and auto-fringe-find for ease of use
• Single mode of operation over all scan ranges for data you can trust
• Strong, stable and robust closed loop Z scanning mechanism

Film Thickness Measurement

New advances in interferometry are enabling more detailed studies of coatings

The latest interferometers can now use field reflectances from different layers of a coated surface to measure the thickness and the roughness of coatings. Two different approaches can be used, depending upon the coating thickness.

The Talysurf CCI SunStar has been designed to offer both types of film thickness measurement in additions to dimensional and roughness capability. Thick film analysis has been used in recent years to study semi-transparent coatings down to about 1.5 microns; the limit is dependent on the refractive index of the materials and the NA of the objective. Thinner coatings have proved more of a challenge.

It is now possible to study thin film coatings down to <300 nm (also refractive index dependent) by interferometry. This new approach allows the study of properties such as film thickness, interface roughness, pinhole defects and delamination of thin coated surfaces, all from a single measurement.

Film thickness

Thin Film Measurement

Thin film coatings are analyzed by the application of the helical complex field (HCF) approach, Patent Taylor Hobson. This is seamlessly integrated into the Talysurf CCI SunStar software and used alongside the standard dimensional and roughness measurement and analysis tools.

Thick Film Measurement

The example shown below is a polymer coating on metal. Information on film thickness, true top surface roughness and interface roughness can be be quickly obtained from a single measurement.

Source: http://www.taylor-hobson.com/