Oxford Instruments Introduces PlasmaPro NGP80 System

A leader in tools for etch, deposition and growth, Oxford Instruments has just launched its PlasmaPro NGP80 system. A compact open-loading tool, PlasmaPro NGP80 offers versatile plasma etch and deposition solutions on one platform with convenient open loading.

Its small footprint system is easy to site and easy to use, with no compromise on process quality, and with multiple process technology configurations. The PlasmaPro NGP80 is ideally suited to R&D or small-scale production, and can process from the smallest wafer pieces to 200mm wafers. The open load design allows fast wafer loading and unloading, ideal for research, prototyping and low-volume production. Other key features of the PlasmaPro NGP80 are the latest generation BUS control system, that greatly increases data retrieval and delivers faster and more repeatable matching, and the clear ease of access to key components for improved servicing and maintenance.

The multiple configurations on offer, RIE, PECVD, ICP & RIE/PE mean that NGP80 offers a solution for a wide range of applications, including III-V etch processes, Silicon Bosch and cryo-etch processes, Diamond Like Carbon (DLC) deposition, SiO2 and quartz etch, hard mask deposition and etch for high brightness LED production and many more.

The Nanoscale Physics Research Laboratory at Birmingham University has been trialling the NGP80 for over a year, using the tool to research the development of new photo-resists for next generation lithography, and the fabrication of high aspect ratio silicon based field emitters.

Dr Alex Robinson is heading the research and has been extremely pleased with the PlasmaPro NGP80 results, "The Plasmapro NGP80 has significantly enhanced our etching capabilities. The new software is very simple to learn, but allows considerable flexibility to build complex processes. Excellent repeatability together with comprehensive parameter logging have enabled a rapid transfer of previously developed fabrication steps to the new machine, consolidating work previously done on several different etchers, whilst the flexibility and ease of use have allowed us to develop our research in new directions."

The equipment was purchased through the AM1 project: Creating and Characterising Next Generation of Advanced Materials. This project is part of a major investment in research infrastructure funded by Advantage West Midlands and the European Regional Development Fund (ERDF) under the wider Birmingham Science City initiative. The investment has united the Universities of Birmingham and Warwick in a newly formed Science City Research Alliance to advance innovation within the region.

Sales Director for OIPT, Mark Vosloo, says the launch is extremely positive for both OIPT and its customers, "As a company we are committed to constant product innovation in order to offer our customers the latest process techniques and systems in etch, deposition and growth. NGP80 has been developed to allow faster throughput, and greater repeatability at a reduced cost to the customer. With such successful trials at Birmingham University now complete, we are confident that our customers will find the PlasmaPro NGP80, Next Generation Plasma tool is living up to its name."

Oxford Instruments aims to pursue responsible development and deeper understanding of the world through Science and Technology, and this latest product innovation and collaboration with a leading research university reinforces this.


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