AIXTRON Secures New MOCVD System Order from Meijo University

AIXTRON AG today announced a new order for one Close Coupled Showerhead GaN based LED MOCVD system from Meijo University, in Nagoya, an established AIXTRON customer in Japan. The order was received earlier this year and the system will be delivered in the fourth quarter of 2010 in a 3x2-inch wafer configuration.The local AIXTRON support team will commission the new reactor at Meijo University.

The order includes both the EpiCurveTT and AIXTRON ARGUS in-situ tool. The latter is a new multi-channel pyrometer that allows real-time surface temperature measurement and analysis and is the only thermal profiling device available for a complete susceptor temperature mapping.

Associate Professor Dr. Motoaki Iwaya comments, “Meijo University plans to establish the LED Cooperative Research Center to develop white LEDs and UV-LEDs for lighting and bactericidal light sources with super energy-saving, high color rendering properties, long life-time and low-cost. This center has been selected as an advanced research institute, and funded by Ministry of Economy, Trade and Industry (METI). The center will be shared with partner companies for collaboration. One of the collaborating companies, EL-SEED Corp., a start-up venture company from Meijo University, will conduct the research project of next-generation white LED supported by the New Energy and Industrial Technology Development Organization (NEDO) at the center. We have been very happy with our current system, an AIX 200/4 RF-S. Furthermore, AIXTRON´s proven R&D showerhead systems have demonstrated in the past their great scalability and easy process transfer to showerhead production systems. The 3x2-inch system enables us to easily switch between 2-, 3- and 4-inch wafers, without any major adaption of the process conditions. Altogether, we are confident that the AIXTRON MOCVD system is the best for the challenging task of GaN based LED development.”


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