Posted in | News | Nanofabrication

Sub-Nanometer Variations to Impact Transistor Functions

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By Dr. Cameron ChaiMar 30 2011

KLA-Tencor has unveiled its SpectraShape 8660 and 8810 dimensional metrology systems, that feature the AcuShape2 modeling software designed jointly with Tokyo Electron Limited (TEL).

The tools can identify the three-dimensional shapes on ICs and control them at manufacturing speeds. The tools help detect high-k metal gates, where sub-nanometer variations can impact transistor functioning, or dual damascene contacts, where tiny change in the lower diameter can impact device output.

Optical dimensional metrology uses advanced mathematical calculations to translate the signals from the hardware. The AcuShape2 software enables both standalone and embedded metrology systems.

The broad features of the SpectraShape 8660 and 8810 incorporating the AcuShape2 are flexible hardware capable of incorporating signals emitted by multiple channels to characterize complicated IC structures, model building user interface that can be utilized by fab engineers with or without external help, and speeded up model building and minimal measurement time.

The SpectraShape 8810 is different from the 8660 due to a deep ultraviolet (DUV) illumination choice that enhances sensitivity for improved materials.

Source: http://www.kla-tencor.com/

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