Nanometrics, a supplier of advanced, automated process control metrology systems for fabricating high-brightness LEDs, solar photovoltaics, semiconductors and data storage devices, has released a novel optical critical dimension (OCD) analysis solution having advanced recipe building, calculating and modeling capabilities.
The NanoCD Suite is a comprehensive solution which includes the NanoDiffract 3.0 OCD software engine, and high-performance hardware and software components. The NanoDiffract engine has been widely adopted by prominent global memory and logic customers. The NanoCD Suite fulfills process control requirements that are needed for semiconductor devices in development at 1x nm nodes and production at 2x nm nodes. It has the ability to optimize sensitivity and handle complex structures.
The NanoCD Suite software simplifies OCD recipe building and includes functions for model optimization that can help speed up the time to results. The suite has a broad range of capabilities for modeling complex 3D structures including production measurements for 3D FinFET transistors, stacked gate Flash architecture, non-planar CMOS and buried-gate DRAMs.
The NanoCD solution allows customers to analyze a large number of different recipes or structural measurements, while using a common platform. Nanometrics has deployed the suite with its IMPULSE and Atlas XP+ systems.
Source: http://www.nanometrics.com/