Posted in | Nanofabrication

AIXTRON Ship Deposition System to Chinese Optical Components Manufacturer

AIXTRON SE today announced that Chinese company Wuhan Huagong Genuine Optics Tech Co., Ltd (HG Genuine), a leading developer and manufacturer of optical components in China, has ordered a 6x2-inch Close Coupled Showerhead (CCS) epitaxial deposition system for production of light emitting and detection devices on indium phosphide substrates.

HG Genuine’s Chief Scientist, Zhaozhong Wang, reports: “This repeat-order reflects our complete satisfaction with the performance of AIXTRON’s technology. Our existing system has demonstrated versatility, ease of operation and reproducibility. With the new system we will be able to carry out our planned expansion of capacity and to develop high quality epitaxy products. I am looking forward to another smooth ramp-up as well as the excellent service, installation and operation we have come to expect from AIXTRON’ service team.”

HG Genuine is one of the manufacturers in China possessing complete mass production lines for epitaxy, chip fabrication, devices, optical modules and subsystems. The product range covers semiconductor laser and detector chips, active devices and transceivers, which are widely applied in digital communication, analog communication and optical sensors.

AIXTRON’s CCS 6x2-inch system is designed for research and production. Processes developed using the CCS systems can be easily scaled up for deployment on the larger mass-production CRIUS platforms. The three-zone heater of the CCS provides best temperature uniformity standards.


AIXTRON AG is a leading provider of deposition equipment to the semiconductor industry. The Company's technology solutions are used by a diverse range of customers worldwide to build advanced components for electronic and opto-electronic applications based on compound, silicon, or organic semiconductor materials and more recently carbon nanostructures.

Such components are used in display technology, signal and lighting technology, fiber communication networks, wireless and cell telephony applications, optical and electronic data storage, computer technology as well as a wide range of other high-tech applications.

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