New Exilis 1 Atomic Layer Deposition System Launched by Denton Vacuum

Denton Vacuum LLC, a leading manufacturer of thin film technology products, announced today the introduction of Exilis 1, a new atomic layer deposition (ALD) system that will deliver breakthrough results for users in the research, aerospace, optics, semiconductor and medical communities.

Exilis 1-photo (PRNewsFoto/Denton Vacuum LLC)

"We've talked to ALD system users all over the world, and they are not happy with what's now available on the market," said Vince McGinty, president and CEO of Denton Vacuum. "Many commercially available ALD systems are limited in capability, while others have proven to be maintenance nightmares, with such simple tasks as chamber cleaning, precursor loading and valve changes turning into complex events that lead to extended, even indeterminate downtime. "Adding to this," McGinty continued, "users in the corporate community often find that systems designed for research and development bear no resemblance to systems designed for manufacturing-scale activities. Exilis 1 addresses these issues, with broader capability, improved productivity and maintainability, and direct paths to production scale-up."

Denton Vacuum's Exilis 1 brings new capability in several key areas, including:

  • Multi-wafer and 3D component capability
  • Expanded process chamber adaptability (remote plasma source, a vacuum load lock, and even integration into a Denton cluster tool)
  • An automated load/unload arm that enables immediate, safe removal of hot substrates from the process chamber
  • Reliable and quick replacement of precursor canisters and ALD valves (the hard-mounted, easy-access manifold incorporates an internal heater assembly, enabling canister or ALD valve changes in less than ten minutes)

For more information regarding Denton's new ALD offering, visit http://www.dentonvacuum.com/products/exilis-1.

About Denton Vacuum LLC
Now in its 50th year, Denton Vacuum continues to transform barriers into thin-film technology breakthroughs for customers across the globe. With operations in the United States and China, Denton designs and develops systems that precision-coat aerospace components, advanced optics, medical implants, solar cells, semiconductor devices and much more. Fifty years of tireless innovation have produced robust offerings ranging from high-volume production platforms to unique custom-engineered systems. Denton's technology portfolio includes thermal evaporation, e-beam evaporation, ion-beam-assisted evaporation, magnetron sputtering (including reactive sputtering), plasma-enhanced-chemical-vapor deposition (PECVD), ion etch and ion-beam-assisted deposition (IBAD). As a leading source for thin-film technology, Denton also provides value-added services and lifetime support that set new industry standards. See how barriers become breakthroughs by visiting www.Dentonvacuum.com.

Contact: Ernie Burrell, Regional Sales Manager, at Email or 856-380-5222

Source: http://www.dentonvacuum.com

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