Increased Applications For Anchor’s NanoScope DFM Platform

Anchor Semiconductor, the pioneer and technology leader in design-for-manufacturing (DFM) solutions for controlling layout-to-silicon pattern transfer, and Dongbu HiTek, the biggest pure-play foundry in Korea, jointly announce the increased applications and long term commitment to Anchor’s NanoScope DFM Platform, after rigorous evaluation among multiple suppliers. Anchor and Dongbu will also cooperate in the development of advanced pattern defect management systems to speed up the post-RET/OPC verification process and yield ramp up through knowledge deposition and reuse utility.

Dongbu was an early adopter and satisfied customer of the NanoScope DFM Platform. The current applications at Dongbu focus on NanoScope-PRV™, a model-based, full chip post-RET/OPC verification product. Over the years, NanoScope has helped to shorten the time-to-better-yield at Dongbu for its manufacturing facilities.

With its unique pattern-centric architecture, the NanoScope™ platform presents a major technology and industry breakthrough in speed and accuracy, using distributed computing on generic network computers. NanoScope-PRV™ leads the industry in simulation-based comprehensive inspection, analysis, and process-limiter pattern extraction. It ensures inspection accuracy with no compromise in performance for critical layer verification before mask making.

“After an extended technical evaluation of post-OPC verification tools available in the market place, Dongbu decided not only to continue its NanoScope usage but also expanded the licensing agreement to meet our rising business demand. We adopted the NanoScope-PRV product at 130nm node with excellent results now onto 90nm process and beyond. Anchor's software-based solution provides the optimum cost of ownership that combines accuracy, performance, reliability and ease-of-use. Moving forward, Dongbu will partner with Anchor in developing new advanced product features such as OPC pattern defect management tools that will enhance our competitiveness," stated Dr. Keeho Kim, Executive VP, Advanced Nano-Tech Development Team at Dongbu HiTek.

“We are delighted to see Dongbu’s decision to continue this mutually beneficial business relationship. It’s proven again that Anchor’s software-based solution of utilizing existing computing infrastructure can deliver good performance and accuracy without the expensive proprietary hardware. I am also delighted that Anchor will cooperate with Dongbu to develop additional industry-leading pattern transferring capabilities. Anchor values Dongbu’s technology development partnership as well as being a loyal customer,” commented Dr. Chenmin Hu, President of Anchor Semiconductor.

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