The HPR-30 is a residual gas analyser that is designed to test gases and vapours for vacuum diagnostics and in vacuum processes.
The system can be modified for individual process applications such as plasma etching, MOCVD, CVD, in-process contaminant monitoring and process gas purity.
The HPR-30 system comprises a close-coupled re-entrant aperture for sampling directly within the process region, thereby offering total data integrity and rapid confirmation of process status.
The advanced Hiden 3F series triple filter quadrupole system (optional) can provide part-per-billion (ppb) detection levels, improved abundance sensitivity and high contamination resistance, mainly suited to the testing of aggressive gases in CVD and RIE applications.
The main features of the HPR-30 residual gas analyzer are listed below:
- Detection to 5ppb
- Triple filter mass spectrometer
- Mass range options 200, 300, 500 or 1000amu
- Enhanced abundance sensitivity
- APSI-MS soft ionization mode
The HPR-30 residual gas analyzer can be applied in the following areas:
- Plasma characterization
- CVD / MOCVD / ALCVD
- Freeze drying
- Residual gas analysis
- Vacuum processing