The Hiden ESPion system offers fully automated, real-time acquisition of key plasma parameters, providing detailed insights for plasma characterization, including:
- Electron density
- Ion flux
- Electron Energy Distribution Function (EEDF)
- Plasma potential
- Electron temperature
- Ion density
Results are obtained using Hiden's ESPionsoft automatic analysis software, which includes both the Orbital Motion Limited (OML) and Allen Boyd Reynolds (ABR) standard plasma analysis models.
For spatially resolved data, the system can be paired with the Hiden Z-drive option, which enables measurements across the plasma volume. Standard Z-drive translation lengths are available in 300 mm, 600 mm, and 900 mm configurations.
Key Features
- 15 scans per second acquisition rate, with D-O-E interface supporting automatic, semi-automatic, or manual analysis modes
- Industry-leading in passive RF compensation
- Highest blocking impedance of any commercial probe, with 4.25 MΩ at 13.56 MHz (compared to 100 kΩ in typical systems)
- Gas-cooled multi-inductor chain enables stable operation in high-temperature plasma environments
- User-replaceable inductor chain, allowing tuning to alternative frequencies
- Reference probe compensation corrects for low-frequency effects such as plasma potential shifts (e.g., from anodized chamber walls) or electrical noise (e.g., from power supplies)
- Fastest pulsed plasma response available in any commercial probe
- ESPionSoft includes built-in gating circuitry as standard
- Auto linear drive options available in 300 mm, 600 mm, and 915 mm lengths
- Additional hardware options include interlocked isolation valves, 90° probe configurations, and combined linear–rotary drives
- Self-cleaning cycle minimizes contamination of the probe tip
- ESPionSoft control via RS232, RS485 or Ethernet LAN
Applications
- Diamond-Like Carbon (DLC) coating
- Pulsed Laser Deposition (PLD) coatings
- DC magnetron deposition of SiBCN films
- Plasma characterization
- Plasma etching ALE
- HiPIMS