SIMS Workstation: UHV Surface Analysis System for Thin Film Depth Profiling from Hiden Analytical

The Hiden SIMS workstation is designed to handle high performance static and dynamic SIMS applications for detailed surface composition analysis and depth profiling.

The SNMS facility complements the SIMS method, thereby providing quantification for thin film composition measurements. The latest SIMS-on-a-Flange from Hiden offers a complete SIMS facility on a single UHV conflat type flange.

Key Features

The main features of the SIMS workstation are:

  • Hiden MAXIM SIMS analyser operating under MASsoft 7 Professional for ppb analysis
  • Built-in ioniser for efficient SNMS testing
  • IG20 Gas, IG5C Caesium, IFG200 FAB or high performance liquid gallium guns
  • Integral ion gun raster control with signal gating for depth profiling
  • Electron flood gun option for charge neutralisation in insulator studies
  • Vacuum chamber bakeout heaters
  • Rapid sample transfer, sample holder and manipulator with load lock
  • Several differentially pumped primary excitation source options
  • UHV manipulator for optimum sample positioning
  • SIMS elemental imaging option with ESM LabVIEW SIMS imaging program
  • Static SIMS spectral library available
  • Automatic mass alignment for optimum SIMS performance
  • Automatic SIMS ion optics lens tuning


The main applications of the SIMS workstation are:

  • Catalysis
  • Surface analysis
  • Nanotechnology
  • Surface science
  • Thin film and surface engineering

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