Posted in | Spectrometers

Hiden’s RGA System for Process Monitoring: HMT

The Hiden HMT quadrupole mass spectrometer is a one-of-a-kind dual-mode RGA device that can operate at pressures as high as 5×10-3 mbar without the use of differential pumping. A carefully constructed ion source/quadrupole filter pair and software that corrects for abundance non-linearity are used to operate at this pressure.

The HMT is suited for process monitoring applications thanks to its unique high-pressure specification.

Applications

  • Thin-film optical covering
  • ALD/MOCVD/CVD
  • Residual gas analysis
  • Near atmospheric XPS, APXPS
  • Vacuum processing

Overview

The HMT is used for vacuum process analysis and residual gas analysis, and it is important for process operating condition checks as well as in-process analysis for identifying unexpected pollutants. In addition, the HMT system can operate in RGA mode, just like a regular quadrupole RGA.

Partial pressure sensitivity in the 10-13 mbar range is achieved using dual Faraday/electron multiplier detectors. CVD, etching, PECVD and PVD are examples of processes that can be monitored. In short, HMT is a troubleshooting and monitoring RGA tool for processes.

Features

  • RGA mode for high sensitivity operation at P < 10-4 mbar (minimum noticeable partial pressure 2 × 10-11 mbar)
  • HMT mode for a high-pressure operation to 5×10-3 mbar (minimum noticeable partial pressure 5 × 10-8 mbar)
  • 100 amu mass range, Remote (PC) Control interface through MASsoft Professional PC software
  • Quick access, mixed-mode scanning Trend and Analog in several windows for example
  • Data export capacity to ASCII format and all Windows devices
  • Stability (less than ±1% height variation over 24 hours)
  • Dynamic Data Exchange facility for real-time data transfer to other DDE client well-suited Windows™ applications, for example, Excel, SPC-IV statistical process control software.
  • The cursor for peak height recognition under mouse control
  • Real time background subtract, automatic mass scale alignment
  • MASsoft software control through RS232, USB or multiple systems through Ethernet LAN
  • Instantaneous live time display of graphical and tabular trend analysis data
  • Dynamic Data Exchange facility for real-time data transfer to other DDE client well-suited Windows™ applications, for example, Excel, SPC-IV statistical process control software.

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