The HALO 201 MBE is a gas analysis system for molecular beam epitaxy applications. Hiden’s HALO systems are intended for RGA, gas analysis and process monitoring applications such as leak detection, trend analysis and vacuum survey.
Applications
- Solar cells
- Semiconductor production
- Quantum Nanostructure fabrication
Overview
The MBE-specific analyzers are made of suitable materials and are designed for long-term use in MBE conditions, with molybdenum wire in place of copper and a contamination-resistant ion source shroud as standard.
Features
- Ion source shroud that is resistant to contamination
- RGA operation with a thermal extender during bakeout
- Electron multiplier with two Faraday plates and a channelplate
- In MBE situations, molybdenum wire is used instead of copper wiring to extend the life of RGA systems
- 2 × 10-13 mbar minimum detectable partial pressure