China’s GSMC Selects SPTS Rapier Etch System to Manufacture Inertial MEMS Devices

SPTS Technologies, a supplier of advanced wafer processing solutions for the global semiconductor industry and related markets, today announced that it has secured an order from one of China’s leading foundries, Grace Semiconductor Manufacturing Corporation (GSMC). The SPTS Omega c2L Rapier etch system will be used to manufacture inertial MEMS devices in Shanghai, China.

SPTS Rapier silicon DRIE system

The Rapier system will perform a variety of DRIE processes, including the tilt sensitive features common to products such as accelerometers and gyroscopes. The system will also be configured with CLARITAS®, SPTS’ unique end point detection technology.

“We chose SPTS after running demonstrations with several DRIE vendors. SPTS’ results were consistent with their position as the number one supplier to our industry,” said Dr. Qi Li, vice president of purchasing at GSMC. “Their deep understanding of MEMS processing will be valuable as we ramp products through our new line.”

“We are very pleased to win this order from GSMC,” said Dr. Dave Thomas, etch marketing director at SPTS. “GSMC’s vision is to be a leader in differentiated technologies, and MEMS fits perfectly into their portfolio. China is becoming a MEMS powerhouse and we look forward to helping GSMC share in that growth.”

According to a recent IHS report, the booming smart phone market in China is driving demand for motion sensors. With that, China’s MEMS market value is expected to hit $2.3 billion this year, at a compound annual growth rate (CAGR) of approximately 13.4 percent.


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