Aviza Technology Ships Omega fxP Etch System to STMicroelectronics

Aviza Technology, Inc., a supplier of advanced semiconductor capital equipment and process technologies for the global semiconductor industry and related markets, today announced it has shipped its Omega fxP deep silicon (DSi) etch system to STMicroelectronics. The system is being used for manufacturing leading-edge MEMS (Micro Electro-Mechanical Systems) devices at ST's new 200mm facility in Agrate, Italy; Europe's first 200mm volume production MEMS fabrication plant.

The Omega DSi system is equipped with 4 process modules, each capable of multiple applications for volume production. The principle applications are high-rate etching (greater than 30 micron/min) of deep cavities that encapsulate MEMS devices, and etching deep trenches stopping on an oxide isolation layer.

"During the selection process, Aviza was able to demonstrate their technical capabilities and meet our production requirements for two key etch processes," said Patrizia Introini, General Manager of ST's Agrate Manufacturing Operation. "In addition, Aviza has demonstrated fast response times and a strong global service and support infrastructure, which are very important criteria for our suppliers. These factors made Aviza the ideal candidate to support STMicroelectronics' etch technology requirements for MEMS manufacturing."

The number of consumer applications incorporating MEMS devices continues to grow, including microphones in cell phones, accelerometers and gyroscopes in consumer gaming applications, optical MEMS for TVs, and automotive sensors. As of 2006, the European MEMS manufacturers represented 16-percent market share, or $6 billion, of the global MEMS market (Source: SEMI, November 2006). Overall market figures have indicated growth forecast of about 100% in the five years from 2005 to 2010, with the worldwide MEMS market approaching $10 billion by 2010.

"STMicroelectronics is a valued customer and long-term partner of Aviza. We are very pleased that they have selected our deep silicon etch system for volume production of MEMS devices," said Kevin Crofton, Vice President and General Manager, PVD/CVD/Etch Business Unit of Aviza Technology, Inc. "STMicroelectronics is at the forefront of MEMS device manufacturing and our deep silicon-etch technology offers a unique solution for this growth market."


Please use one of the following formats to cite this article in your essay, paper or report:

  • APA

    STMicroelectronics. (2019, March 19). Aviza Technology Ships Omega fxP Etch System to STMicroelectronics. AZoNano. Retrieved on May 23, 2024 from https://www.azonano.com/news.aspx?newsID=4503.

  • MLA

    STMicroelectronics. "Aviza Technology Ships Omega fxP Etch System to STMicroelectronics". AZoNano. 23 May 2024. <https://www.azonano.com/news.aspx?newsID=4503>.

  • Chicago

    STMicroelectronics. "Aviza Technology Ships Omega fxP Etch System to STMicroelectronics". AZoNano. https://www.azonano.com/news.aspx?newsID=4503. (accessed May 23, 2024).

  • Harvard

    STMicroelectronics. 2019. Aviza Technology Ships Omega fxP Etch System to STMicroelectronics. AZoNano, viewed 23 May 2024, https://www.azonano.com/news.aspx?newsID=4503.

Tell Us What You Think

Do you have a review, update or anything you would like to add to this news story?

Leave your feedback
Your comment type

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.